| 基于波数扫描干涉的表面轮廓测量 |
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| 引用本文： | 何艳敏,谢创亮,许卓明,鲍鸿,叶双莉,周延周.基于波数扫描干涉的表面轮廓测量[J].激光技术,2016,40(3):392-396. |
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| 作者姓名： | 何艳敏 谢创亮 许卓明 鲍鸿 叶双莉 周延周 |
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| 作者单位： | 1.广东工业大学 自动化学院, 广州 510006; |
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| 基金项目： | 国家自然科学基金资助项目(51371129；11174226)；广东省自然科学基金资助项目(1414050002003)；广州市科技计划资助项目(2014 J4100203) |
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| 摘 要： | 为了高精度测量被测物体表面3维轮廓,采用半导体激光器波数扫描干涉的方法,对激光波数扫描干涉进行了理论分析和实验验证。在迈克尔逊干涉系统的参考端引入一个光楔,通过2-D傅里叶变换提取光楔干涉图像的相位,在线检测激光器输出波数变化,最后对所有时间分辨干涉图像序列进行随机采样傅里叶变换,还原被测物体表面3维轮廓。结果表明,轮廓测量精度达到6.7nm。该方法特别适合于机械零件的质量检验。
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| 关 键 词： | 激光技术 轮廓测量 波数扫描 半导体激光器 随机采样傅里叶变换 |
| 收稿时间： | 2015-04-14 |
Profilemetry measurement based on wavenumber scanning interferometry |
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| Abstract: | In order to measure 3-D profile of a sample with high accuracy , wavenumber-scanning interferometry was used . An optical wedge was used as reference terminal of a Michelson interferometer system .The phases of wedge interference image were extracted by 2-D Fourier transform.The changes of output wavenumber were detected on line .Finally, all the time-resolved interferometry image sequences were sampled by Fourier transform random .The 3-D contour of object surface was restored with high precision.The profile of a sample object was constructed with the resolution of ±6.7nm.The proposed method is particularly suitable for quality inspection of mechanical parts . |
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| Keywords: | laser technique profile measurement wavenumber scanning diode laser random sampling Fourier transform |
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