Abstract:A kind of three-dimensional structure building method of MEMS device is presented. The whole procedure of realizing 3-dimensional structure conversion is introduced detailedly in this paper. Some related algorithms of polygon partition, process explanation and 3-dimensional structure building have been emphasized here. According to process flows and parameters of MEMS device chosen by user, conversion is implemented from pretreating of 2-dimensional layout file to loading of process flows, from correlative parameters choosing to process steps matching, up to processes explanation in the end to realize 3-dimensional solid structure of devices. Based on above course, an executable file is built by programming. Some kinds of MEMS devices have been described correctly in 3-dimensional space by the executable file which validates this three-dimensional building method.